Matches 301 - 350 out of 1067 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >
Match Document Document Title
6485248 Multiple wafer lift apparatus and associated method  
An apparatus and associated method for transporting a first substrate and a second substrate relative to a cell. The cell contains a pedestal that is configured to interact with a single substrate....
6484415 Vacuum processing apparatus  
A wafer conveyor system for used in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure....
6484414 Vacuum processing apparatus  
A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a robot disposed in the conveyor chamber of the vacuum loader. The robot includes an...
6481945 Method and device for transferring wafers  
Enhanced inserts are formed having a cylindrical grip and a protrusion extending from the grip. An ultra hard material layer is bonded on top of the protrusion. The inserts are mounted on a rock...
6473996 Load port system for substrate processing system, and method of processing substrate  
In a load port mechanism of a substrate treatment unit, protuberances are provided on a sealing surface formed along a door with which a wafer carrier is to dock, or on a sealing surface formed...
6473989 Conveying system for a vacuum processing apparatus  
A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure that includes a robot, a cassette table for holding the cassette, an...
6471459 Substrate transfer shuttle having a magnetic drive  
A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle,...
6470927 Foup opener  
A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and...
6468353 Method and apparatus for improved substrate handling  
A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be...
6468021 Integrated intra-bay transfer, storage, and delivery system  
An integrated intra-bay transfer, storage and delivery system is provided for moving an article between a conveyor and a station such as a work station. The system includes a transfer assembly...
6467626 Wafer storing method and storing container therefor and wafer transferring method for transferring wafer to the storing container  
Adhesion of particles on the surface of a wafer is prevented even if particles are generated during transport, by transferring the wafers after mirror-polishing, cleaning, and drying into a...
6467186 Transferring device for a vacuum processing apparatus and operating method therefor  
A transferring device for a semiconductor wafer which transfers a wafer storing structure to a table and/or other positions within the vicinity of a vacuum processing apparatus and removes wafers...
6463678 Substrate changing-over mechanism in a vaccum tank  
This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum...
6463676 Vacuum processing apparatus and operating method therefor  
A method and apparatus for transferring a substrate that includes a cassette table capable of holding a plurality of cassettes, wherein the cassettes are capable of receiving a plurality of...
6461437 Apparatus used for fabricating liquid crystal device and method of fabricating the same  
An apparatus for manufacturing a liquid crystal display device that can prevent chemical contamination attributed to contacting an external atmosphere, and a method of manufacturing the liquid...
6461094 Loading and unloading station for semiconductor processing installations  
In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room...
6460270 Vacuum processing apparatus  
A vacuum processing apparatus which includes a means for transferring wafer cassettes from a transferring chamber to a lock chamber. The wafer cassettes are mounted within a cassette table in a...
6457253 Vacuum processing apparatus  
A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure....
6456364 Semiconductor manufacturing apparatus, and device manufacturing method  
A semiconductor manufacturing apparatus having a guard system, an interlocking system operable in response to loss of function in a portion of the guard system, to stop a corresponding operation in...
6454519 Dual cassette load lock  
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
6454512 Person-guided vehicle  
A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV...
6454508 Dual cassette load lock  
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
6450750 Multiple loadlock system  
A semiconductor processing system having a holding chamber coupled to a mainframe processing system and at least one loadlock chamber coupled to the holding chamber in which unprocessed wafers are...
6449522 Managing a semiconductor fabrication facility using wafer lot and cassette attributes  
Systems and methods for managing automated material handling systems, such as semiconductor fabrication facilities, using material item (e.g., wafer lot) attributes and cassette attributes are...
6447607 Apparatus for growing thin films  
The invention relates to an apparatus for growing thin films onto the surface of a substrate by exposing the substrate to alternately repeated surface reactions of vapor-phase reactants. The...
6447233 Automated door assembly for use in semiconductor wafer manufacturing  
An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base...
6447232 Semiconductor wafer processing apparatus having improved wafer input/output handling system  
A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean...
6446353 Vacuum processing apparatus  
A vacuum processing apparatus which includes a cassette mount table for holding a cassette, a conveying structure for transferring a wafer from the held on the cassette mount table, a robot, and a...
6439822 Substrate processing apparatus and substrate processing method  
A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a...
6435809 Dual arm linear hand-off wafer transfer assembly  
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the...
6435799 Wafer transfer arm stop  
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the...
6435798 Semiconductor processing apparatus with substrate-supporting mechanism  
A semiconductor processing apparatus for processing a semiconductor substrate includes: (i) a vacuum-exhausted chamber; (ii) a susceptor which is provided within the chamber and which holds the...
6431807 Wafer processing architecture including single-wafer load lock with cooling unit  
A wafer processing system includes a single-wafer load lock with integrated cooling unit. The small volume of the single-wafer load lock allows for fast pump down and vent cycles. By integrating a...
6431806 Adapter device for carrier pods containing at least one flat object in an ultraclean atmosphere  
An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be...
6430839 Method of transferring a material from first apparatus to second apparatus in the clean room and an assembly line  
A transport enclosure arranged between a first apparatus and a second apparatus, all located in a clean room, is shielded from the clean room and maintained a degree of cleanliness which is cleaner...
6430802 Clean box, clean transfer method and apparatus therefor  
A clean box has a box body having an aperture in one side surface, an opening/closing lid for hermetically closing the aperture while undergoing vacuum suction to the box body, and a plurality of...
6428262 Compact load lock system for ion beam processing of foups  
The system processes one or more wafers from a FOUP to an ion processing chamber. A group of wafers from the FOUP is removed by a first end effector and loaded into a load lock through a lower door...
6425722 Substrate treatment system, substrate transfer system, and substrate transfer method  
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening...
6422823 Mini-environment control system and method  
A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure...
6422798 Process and arrangement for continuous treatment of objects  
The invention relates to a process for continuous treatment of objects in a processing unit, where the objects are moved along a conveyor track passing through the processing unit by a first...
6419438 FIMS interface without alignment pins  
A front opening interface mechanical standard, or “FIMS”, system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide...
6417014 Method and apparatus for reducing wafer to wafer deposition variation  
A processing line includes a processing tool and an automatic process controller. The processing tool is adapted to deposit a layer of material on a semiconductor wafer based on an operating...
6410455 Wafer processing system  
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a...
6409448 Ergonomic load port  
A load port module is mounted adjacent a process tool for loading semiconductor wafers to the process tool and unloading them from the process tool. The module includes a mounting frame having a...
6406245 Processing system and device manufacturing method using the same  
A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for...
6398475 Container  
A container for receiving and transporting dust free articles which is opened and closed by inserting a positioning pin and a key in an opener mechanism into a positioning hole and a key hole...
6395094 Process system with transfer unit for object to be processed  
A process system comprises cassette housing chambers 33 A and 33 B, each of which houses therein a cassette C having housed an object W to be processed, and process chambers 26 A through 26 D...
6394733 Substrate body transfer apparatus  
A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination...
6390754 Wafer processing apparatus, method of operating the same and wafer detecting system  
A closed-type cassette is mounted on a cassette stand disposed in a working region at a position corresponding to an opening formed in a wall separating the working region from a loading region....
6390448 Single shaft dual cradle vacuum slot valve  
A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each...
Matches 301 - 350 out of 1067 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >