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6599076 |
Dual cassette load lock
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
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6599075 |
Semiconductor wafer processing apparatus
A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean...
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6595370 |
Apparatus and method for reducing contamination in a wafer transfer chamber
A wafer transfer chamber, such as a load-lock chamber used in a cluster processing tool for semiconductor devices that has reduced particle contamination problem is provided. In the wafer transfer...
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6592450 |
Access floor using special transfer paper
Disclosed is an access floor made using a special transfer paper which is laid on a floor of the interior of a clean room to prevent generation of dusts or bacteria in a factory of and integrated...
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6592318 |
Docking cart with integrated load port
An integrated wafer transport and transfer device is disclosed, which includes a vehicle with an integrated docking platform for holding a wafer carrier such as a FOUP (front opening unified pod)....
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6592317 |
Pod loader interface end effectors
An end effector for a pod loader interface includes a gripper plate that attaches to the articulated arm. A pair of gripper blades are separated from each other along and are coupled to the gripper...
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6591987 |
Wafer retainer
A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at...
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6588123 |
Apparatus and method for preventing a wafer mapping system of an SMIF system from being polluted by corrosive gases remaining on wafers
An apparatus and a method for preventing a wafer mapping system of an SMIF system from being polluted by a corrosive gas remaining on wafers according to the present invention are disclosed. The...
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6585478 |
Semiconductor handling robot with improved paddle-type end effector
A robotic semiconductor handling system includes two robot arms for transferring substrates between processing, cooling, and storage stations. The first robot arm has a paddle-type end effector...
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6585470 |
System for transporting substrates
A system for transporting substrates into a clean room is provided. The system has an isolation chamber located between the clean room and a staging area. A first movable closure is coupled to the...
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6582296 |
Ventilating method and ventilating system for semiconductor manufacturing apparatuses
A semiconductor manufacturing apparatus ventilating system can reduce energy consumption with respect to air-conditioning and a power spent for transporting air in a clean room by minimizing an...
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6582178 |
Mini-modual manufacturing environmental
A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports...
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6582174 |
Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a rotation accommodating shelf and a transfer machine. The rotation accommodating shelf is capable of accommodating a plurality of accommodating containers...
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6577923 |
Apparatus and method for robotic alignment of substrates
A robot device that either translationally or rotationally aligns an object with a slot. For translational alignment, the robot device comprises a position sensor positioned in close proximity to...
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6575737 |
Method and apparatus for improved substrate handling
A transfer chamber is provided. The transfer chamber has a temperature adjustment plate located in an upper portion of the chamber, a substrate handler located in a lower portion of the chamber,...
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6575687 |
Wafer transport system
A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a...
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6572320 |
Robot for handling workpieces in an automated processing system
An automated workpiece processing system has a transfer robot including an end effector having arms which move linearly towards each other to pick up a workpiece. Each arm has two workpiece...
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6568896 |
Transfer chamber with side wall port
A chamber for transferring a substrate is provided. In one embodiment, a chamber for transferring a substrate includes at least one side wall supporting a lid and coupled to a chamber bottom. The...
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6558100 |
Vacuum processing apparatus and a vacuum processing system
The vacuum processing apparatus has an atmospheric loader having a plurality of cassette tables and a transport unit for carrying wafers, a vacuum loader equipped with vacuum wafer-processing...
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6551405 |
Tool and method for in situ vapor phase deposition source material reloading and maintenance
A tool and method for reloading source materials in a vapor phase deposition (VPD) environment is disclosed. The tool and method does not require the venting of the VPD environment in order to...
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6551045 |
Wafer stage chamber
A wafer stage chamber assembly is provided to isolate semiconductor substrates, a wafer stage device, and the process of making semiconductor wafers from the atmosphere so that the resulted wafers...
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6551044 |
Bellows isolation for index platforms
A loadlock chamber for a semiconductor processing apparatus comprises an index platform or registration plate, a shaft extending through a wall of the chamber to actuate the platform, and a bellows...
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6549825 |
Alignment apparatus
An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position...
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6543981 |
Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation
A method for creating a reduced particle environment in a localized area of a mechanically active transport interface is provided. The augmentation of the air flow results in a sweeping air flow to...
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6541787 |
Optically aligning a loadport on a process machine by transmitting light through a system of apertures
An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and...
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6540869 |
Semiconductor processing system
A semiconductor processing system comprises a first vacuum processing unit and a second vacuum processing unit connected thereto. The first and second vacuum processing units respectively comprise...
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6540469 |
Substrate processing apparatus
A substrate processing apparatus includes a process tube for processing a plurality of substrates, two boats for accommodating the substrates, two boat elevators, a substrate transfer unit for...
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6540466 |
Compact apparatus and method for storing and loading semiconductor wafer carriers
An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus preferably provides an elevated...
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6540465 |
Substrate processing apparatus
A substrate processing apparatus that includes a preliminary chamber and a substrate transferring apparatus. The substrate transferring apparatus is disposed in the preliminary chamber for...
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6537012 |
Vacuum processing apparatus and a vacuum processing system
The vacuum processing apparatus has an atmospheric loader having a plurality of cassette tables and a transport unit for carrying wafers, a vacuum loader equipped with vacuum wafer-processing...
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6537011 |
Method and apparatus for transferring and supporting a substrate
A method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system. In one aspect, a support ring having one or more substrate support members mounted...
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6533521 |
Integrated substrate handler having pre-aligner and storage pod access mechanism
Access to the interior of a substrate storage pod in which substrates such as semiconductor wafers are stored is gained using an access device provided within a micro environment enclosure. The...
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6530733 |
Substrate processing pallet and related substrate processing method and machine
A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure...
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6530732 |
Single substrate load lock with offset cool module and buffer chamber
A load lock and related method of handling a substrate involves placing a substrate onto a vertically movable poppet and moving the poppet between two vertically opposed subchambers such that in...
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6520727 |
Modular sorter
A modular sorter is disclosed in which modular sections maybe easily added and removed to add and remove load port assemblies as required by a particular wafer fabrication run. In one embodiment, a...
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6520726 |
Apparatus and method for using a robot to remove a substrate carrier door
A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the...
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6519504 |
Vacuum processing apparatus and semiconductor manufacturing line using the same
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
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6517691 |
Substrate processing system
A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or...
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6517304 |
Method for transporting substrates and a semiconductor manufacturing apparatus using the method
A method for transporting a substrate between a carrier, which holds the substrate, and a semiconductor manufacturing unit, which receives the substrate. The method includes steps of applying the...
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6517303 |
Substrate transfer shuttle
The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a...
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6517048 |
Isolation valves
Isolation valves for selectively sealing a first region from a second region. A gate valve can include a housing which defines a channel between the first and second regions. The valve includes a...
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6515736 |
Reticle capturing and handling system
A reticle capturing system includes a reticle that defines a first recess extending into the reticle from a first edge of the reticle and a second recess extending into the reticle from a second...
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6512017 |
Handling of a catalyst
This invention relates to methods of minimizing catalyst degradation during the handling of a catalyst used in a slurry phase reactor. The methods include catalyst handling steps such as catalyst...
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6506009 |
Apparatus for storing and moving a cassette
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall and vertically disposed relative to a plurality of cassette docking stations, and a cassette...
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6505415 |
Vacuum processing apparatus
A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure which includes a robot for conveying a wafer held on the cassette mount...
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6503379 |
Mobile plating system and method
An exemplary mobile plating system and method are provided for performing a plating process using virtually any known or available deposition technology for coating or plating. The mobile plating...
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6503365 |
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in...
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6496746 |
Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool
A method and apparatus for producing schedules for a wafer in a multichamber semiconductor wafer processing tool comprising the steps of providing a trace defining a series of chambers that are...
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6494670 |
Three chamber load lock apparatus
A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing...
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6491802 |
Magnetic film forming system
A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction is disclosed. The magnetic film forming system includes a vacuum container, a substrate...
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