Matches 201 - 250 out of 1067 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >
Match Document Document Title
6719517 Substrate processing apparatus with independently configurable integral load locks  
A substrate processing apparatus comprising a frame, at least one processing module, and a substrate transport apparatus. The frame defines a first chamber with outer substrate transport openings...
6719516 Single wafer load lock with internal wafer transport  
The present invention provides a load lock having a vertically movable lid, an internal robot, and a wafer lifting mechanism and further provides a method of transferring wafers through a load lock...
6716651 Method and apparatus for identifying a wafer cassette  
A wafer/loadport assembly that has a built-in, self-identification system and a method for operating the assembly are described. The wafer cassette is equipped with recessed holes provided with...
6712577 Automated semiconductor processing system  
A semiconductor processing system for wafers or other semiconductor articles. The system uses an interface section at an end of the machine accessible from the clean room. A plurality of processing...
6710436 Method and apparatus for electrostatically aligning integrated circuits  
One embodiment of the present invention provides a system that uses electrostatic forces to align semiconductor chips relative to each other. The system operates by fabricating a first set of...
6709218 Robot blade for semiconductor processing equipment  
The present invention generally provides a robot blade which provides a plurality of semi-conductive or conductive contacts disposed at least partially on the surface of the blade to support a...
6705828 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
6704998 Port door removal and wafer handling robotic system  
An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient...
6702540 Machine and method for manufacturing compact discs  
A compact disc manufacturing machine carrying out a plurality of manufacturing stages including a vacuum stage. A central manipulator has a plurality of radially and outwardly extending manipulator...
6701972 Vacuum load lock, system including vacuum load lock, and associated methods  
A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus,...
6699173 Canopy seal for infant care apparatus  
An infant care apparatus having a canopy movable vertically with respect to an infant platform. The canopy has a lower edge mating with upper peripheral edges of a plurality of vertical walls...
6698992 Elastically expandable positioning device  
An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input...
6698991 Fabrication system with extensible equipment sets  
A fabrication system is provided which includes a storage apparatus coupled perpendicularly to a branch transport aisle, and one or more environmentally controlled fabrication tools coupled...
6692209 Method and system for manufacturing a photocathode  
A system ( 10 ) for manufacturing a photocathode includes a housing ( 12 ) having a first end and a second end. The first end of the housing ( 12 ) is operable to be coupled to a vacuum chamber (...
6690993 Reticle storage system  
A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a...
6690986 Method of detecting the position of a wafer  
An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber into which wafers are loaded through a pair of loadlocks which are spaced one above the other. A robot within...
6688375 Vacuum processing system having improved substrate heating and cooling  
The invention is directed a vacuum processing system having improved substrate heating and cooling facilities. An evacuable chamber of the system includes a first section in which a temperature of...
6682343 Substrate processing apparatus  
A substrate processing apparatus includes a substrate holder for holding a substrate with a holding angle of 45 degrees to 90 degrees with respect to a horizontal plane, a conveying system to...
6682288 Substrate processing pallet and related substrate processing method and machine  
A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure...
6680775 Substrate treating device and method, and exposure device and method  
The mask guiding device of the present invention has a mask guiding device that guides a substrate received from the outside. The mask guiding device is provided with a plurality of receiving...
6679672 Transfer port for movement of materials between clean rooms  
A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient...
6679671 Substrate transfer shuttle having a magnetic drive  
A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle,...
6678583 Robotic storage buffer system for substrate carrier pods  
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot...
6677594 Scanning wheel for ion implantation process chamber  
A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer 7 on which a wafer is supported. Each wafer support element 3 has a...
6676356 Device for attaching target substrate transfer container to semiconductor processing apparatus  
A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to...
6672864 Method and apparatus for processing substrates in a system having high and low pressure areas  
A positive pressure gradient is maintained across an open access port of an interface chamber such as a load lock chamber which provides an interface between a low pressure chamber such as a...
6672819 Vacuum processing apparatus and semiconductor manufacturing line using the same  
A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an...
6669121 Holder support device  
A holder support device in an electron microscope. The device has a detachable cylindrical holder extending along the X-axis. The holder support device permits the position of the inner end of the...
6663333 Wafer transport apparatus  
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein...
6663332 System for the treatment of wafers  
Installation for treatment of wafers in a reactor. To that end a series of wafers is placed in a wafer rack and fed into the reactor. Transport into and out of the reactor, which is sited in an...
6662465 Vacuum processing apparatus  
A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further...
6662082 System for operating a robot with easy programming  
A robot wherein the condition for a work and a sequence of movements to be performed may be set in connection with positions. In addition to setting a position at which a work is performed, the...
6655891 Substrate treatment system, substrate transfer system, and substrate transfer method  
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening...
6652212 Cylinder, load port using it, and production system  
A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room...
6643564 Method of determining retreat permission position of carrier arm and teaching device thereof  
A retreat permission position of a carrier arm when the carrier arm is moved back to retreat outside a mounting table after the carrier arm carries a substrate to a position above the mounting...
6641350 Dual loading port semiconductor processing equipment  
A substrate processing equipment comprises two pod supporting stages and two independently operable pod door openers. Each pod supporting stage is capable of placing thereon a pod for containing...
6641349 Clean box, clean transfer method and system  
A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box...
6641348 Docking station for substrate transport containers  
A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty...
6637998 Self evacuating micro environment system  
A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the...
6634845 Transfer module and cluster system for semiconductor manufacturing process  
A number of process chambers connected to a transfer module can be increased after a cluster system provided with the transfer module is initially established. The transfer module transfers an...
6619901 Method and apparatus for air guidance in a processing chamber  
An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small...
6616394 Apparatus for processing wafers  
Systems and methods are described for wafer processing. A wafer processing apparatus includes: a first wafer transporter; a process station coupled to the first wafer transporter, the process...
6612797 Cassette buffering within a minienvironment  
A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate...
6609877 Vacuum chamber load lock structure and article transport mechanism  
A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a...
6609869 Transfer chamber with integral loadlock and staging station  
A substrate processing system includes a substrate handling chamber and an integrated load lock chamber. The load lock chamber has a gated inlet for the transfer of a substrate into and out of the...
6602127 Plant for producing semiconductor products  
A plant for producing semiconductor products that includes at least one clean room having a floor and a plurality of production units that are configured in the clean room. The plurality of the...
6601824 Single shaft, dual cradle vacuum slot valve  
A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each...
6599076 Dual cassette load lock  
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
6599075 Semiconductor wafer processing apparatus  
A processor for processing articles, such as semiconductor wafers, in a substantially clean atmosphere is set forth. The processor includes an enclosure defining a substantially enclosed clean...
6595370 Apparatus and method for reducing contamination in a wafer transfer chamber  
A wafer transfer chamber, such as a load-lock chamber used in a cluster processing tool for semiconductor devices that has reduced particle contamination problem is provided. In the wafer transfer...
Matches 201 - 250 out of 1067 < 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 >