Matches 701 - 750 out of 1070 < 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 >
Match Document Document Title
5254170 Enhanced vertical thermal reactor system  
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from...
5234303 In-vacuum conveyance robot  
In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a...
RE34311 Semiconductor slice cassette transport unit  
A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in...
5226781 Process and installation for transferring products from a contaminated enclosure into a second enclosure without contaminating the latter  
For transferring products from a contaminated enclosure (12) into a second enclosure (16) without contaminating the latter, it is proposed to engage on the contaminated enclosure a transportation...
5224809 Semiconductor processing system with robotic autoloader and load lock  
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and...
5223001 Vacuum processing apparatus  
The present invention is a vacuum processing apparatus provided with a vacuum processing chamber which implements a required processing to an object of processing, and a pre-vacuum chamber...
5217053 Vented vacuum semiconductor wafer cassette  
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for...
5215420 Substrate handling and processing system  
A system for handling and processing thin substrates, such as substrates for magnetic disks. The system includes a main chamber, entrance and output load locks, a buffer chamber, substrate...
5202716 Resist process system  
A resist process system of the present invention includes at least two robots for conveying a wafer, a passage through which the robots can move, plural process units arranged along the passage,...
5192188 Lock for the loading and/or discharging of bulk materials  
A lock for the loading and/or discharging of, in particular, not easily flowing, adhering bulk materials into or out of a pressurized or vacuum chamber through a discharge opening of a discharge...
5186594 Dual cassette load lock  
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate...
5183547 Sputtering apparatus and system for sputtering employing same  
The present invention provides a sputtering apparatus employed for producing an optical disc, for example, wherein a material to be processed by sputtering, such as a disc base plate, is placed in...
5181819 Apparatus for processing semiconductors  
A semiconductor processing apparatus comprises a main body having an air passage, a plurality of filter units connected in series with the air passage in the main body, each filter unit having an...
5176493 High speed wafer handling method  
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing...
5174067 Automatic wafer lapping apparatus  
An automatic wafer lapping apparatus in which a pair of turntable stages are provided which each have a vertical central shaft and a pin on which the wafer carriers are spitted and piled up;...
5171541 Fluidized bed discharge process  
Process for discharging solid particulate products present in a fluidized bed reactor in which the polymerization or copolymerization of alpha-olefins is carried out, in a system consisting of a...
5169272 Method and apparatus for transferring articles between two controlled environments  
A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides...
5156521 Method for loading a substrate into a GVD apparatus  
A method for loading a substrate into a receiving chamber upon a positionable platform, which platform is in sealed relationship with the receiving chamber, permits purging of the receiving chamber...
5147168 Loading and unloading airlock apparatus for a vacuum treatment chamber  
A loading and unloading airlock apparatus for a vacuum treatment chamber which includes an airlock chamber, a transport mechanism inside the chamber to transport a substrate holder arranged to have...
5145303 Method and apparatus for reducing particulate contamination in processing chambers  
A load lock removes particulate contamination during microelectronic manufacturing. The load lock may have a single door or two doors, or a single door and a funnel valve. A passageway is defined...
5143254 Device for the metering of granular or powdered products and method of mixing raw rubbers using this device  
The material to be metered drops onto a plate 21 which is driven in rotation. This plate 21 is provided on its edge with a cylindrical wall 22 pierced by recesses 24. The plate 21 turns in a...
5139459 Clean transfer method and system therefor  
A clean transfer method capable of safely transferring a semiconductor or the like to various apparatus for treating the semiconductor while keeping the environment clean. In the method, the...
5137063 Vented vacuum semiconductor wafer cassette  
A vacuum storage cassette for semiconductor wafers has one or more valves to allow the cassette to be evacuated, backfilled, and opened to the surround atmosphere and resealed without the need for...
5135635 Sputtering apparatus  
The sputtering apparatus for the present invention is used for manufacturing optical discs. On loading and unloading of disc substrates to and from a vacuum chamber, a disc entrance and exit...
5135608 Method of producing semiconductor devices  
A process and apparatus for producing semiconductor integrated circuit devices wherein the dry processing and the wet processing are continuously effected for the wafers to be processed, and the...
5133400 Apparatus for rotating and moving an ingot mold table in a vacuum melting and casting unit  
A mold table is linearly moved into a pouring position or a resting position in a vacuum casting unit and rotates around its vertical axis so that the ingot molds disposed on the mold table can be...
5133285 Apparatus for transporting substrates  
Apparatus for transporting substrates 22, 23 in vacuum deposition systems with several stations, comprising plate-like substrate holders 16 which are moved across the stations in a vertical...
5125781 Air lock for transfer of product into and out of vacuum or pressurized chamber  
An air lock transfer device allows the transfer of substances between environments at different pressures, without disrupting the integrity of the pressure differential therebetween and which...
5121705 Loading lock for chemical vapor deposition apparatus  
A loading lock for a chemical vapor deposition apparatus comprises three chambers: an outer chamber for introduction and removal of substrates, a reaction chamber for forming thin films on the...
5116181 Robotically loaded epitaxial deposition apparatus  
A susceptor carrying semiconductor wafers for processing is suspended from a compliant attachment at its upper end and is lowered into a reaction chamber for processing. At the completion of...
5112469 Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber  
An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means...
5112277 Blowing door for ultra-clean confinement container  
The blowing door permits the passage of an object (6) from the interior of a first container (5) to a second container (4) without the respective atmospheres of the interior of these two containers...
5112185 Method for replacing a deposit shield in an evacuated film forming chamber  
A film forming apparatus for forming a film on a substrate set inside a film forming chamber capable of being evacuated comprises; a film forming chamber in which a film is formed on a substrate; a...
5110249 Transport system for inline vacuum processing  
An inline processing system for processing a batch of pallets, including a first magazine for supporting a predetermined number of unprocessed pallets. A load chamber for receiving and supporting...
5110248 Vertical heat-treatment apparatus having a wafer transfer mechanism  
A vertical heat-treatment apparatus is provided with a mechanism for automatically transferring semiconductor wafers from carriers to a boat for a vertical type furnace. The automatic transferring...
5102279 Continuous vacuum processing apparatus  
A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is...
5100287 Method of transferring wafers using vacuum  
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer...
5098245 High speed wafer handler  
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing...
5096364 Wafer arm handler mechanism  
A wafer handler arm conveys a wafer from a horizontal orientation to a vertical orientation for wafer processing. The arm includes a wafer holding member which is rigidly attached to a first shaft....
5092729 Apparatus for transporting a wafer and a carrier used for the same  
A wafer transporting apparatus comprising at least one carrier for supporting a substantially circular thin wafer having a flat plane, the carrier including a supporting base for supporting the...
5092728 Substrate loading apparatus for a CVD process  
Each substrate is loaded into a receiving chamber upon a positionable platform, which platform is in sealed relationship with the receiving chamber to permit purging of the receiving chamber prior...
5090356 Chemically active isolation passageway for deposition chambers  
An improved gas gate (34) is adapted to operatively interconnect to adjacent chambers in which process gases are introduced for depositing a first layer (16) upon a substrate (11) in a first...
5086729 Vacuum processing apparatus and transportation system thereof  
A vacuum processing apparatus comprises a carrying body for holding a glass plate thereon, a pair of elongated stationary members extended in a vacuum chamber in which processing stages for forming...
5083364 System for manufacturing semiconductor substrates  
A system for manufacturing substrates, in particular wafers, glass masks, and channels, having individual process stations for treating and/or processing the various substrates in a clean...
5076205 Modular vapor processor system  
A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands...
5072656 Method and apparatus for controlling the transfer of tubular members into a shelter  
A portable drilling apparatus 10 designed to be used in environmentally severe locations, such as the Arctic, includes provisions for heating various portions thereof, including a pipe shelter 14....
5069269 Lifting and turning unit for a melting and/or casting plant  
A lifting and turning unit for a melting or casting plant. The lifting and turning unit for a deposit stand, preferably a table, for ingot molds of a vacuum melting and casting plant is provided....
5067218 Vacuum wafer transport and processing system and method using a plurality of wafer transport arms  
A vacuum wafer transport and processing system and method includes a central vacuum chamber having wafer holding means disposed therein. A plurality of wafer transport arms are disposed between the...
5062758 Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber for doing work thereon in the chamber  
An automated workpiece handling system rapidly moves a workpiece into a controlled atmosphere chamber, like a vacuum chamber, to a work station, like an electron beam, and withdraws the piece after...
5058526 Vertical load-lock reduced-pressure type chemical vapor deposition apparatus  
A CVD apparatus having a single loading-unloading chamber that serves as a loading chamber in the left and center parts and as an unloading chamber in the right and center parts. Alternately,...
Matches 701 - 750 out of 1070 < 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 >