Matches 651 - 700 out of 1067 < 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 >
Match Document Document Title
5388945 Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers  
A fully automated and computerized conveyor based manufacturing line architecture (15) is provided for the storage, handling and transportation of articles by processing equipment (500). The...
5388944 Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus  
A wafer loading and unloading chamber is provided at the bottom of a reaction tube of a heat treatment section, a robot chamber and cassette chamber are coupled via gate valves to the wafer loading...
5387067 Direct load/unload semiconductor wafer cassette apparatus and transfer system  
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first...
5382127 Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment  
A pressurized interface apparatus (200) is provided for transferring a workpiece from within a pressurized sealable transportable container (100) into a specified environment and vice versa. The...
5382126 Multichamber coating apparatus  
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of...
5378283 Treating device  
A treating device of the closed system structure in which semiconductor wafers are conveyed from a load lock chamber to a process tube comprises a gas feed pipe for feeding inert gas into a load...
5378107 Controlled environment enclosure and mechanical interface  
Disclosed is a method for enabling the contents of a first chamber to be moved into a second chamber without exposing either chamber to elements making particulate-producing sliding contact. In one...
5377816 Spiral magnetic linear translating mechanism  
A spiral magnetic linear translating mechanism for use with a wafer processing system which includes a plurality of evacuatable housings connected in a series to form a processing line comprises at...
5377476 Arrangement for storing, transporting and loading substrates  
Arrangement for storing and transporting substrates under clean room conditions and for loading the substrates into a clean room. The substrates are individually accommodated in cassettes which are...
5376212 Reduced-pressure processing apparatus  
A reduced-pressure processing apparatus which comprises a wafer table, two processing chambers, and three load-locking chambers. The wafer table temporarily supports a workpiece. In the first...
5374148 Procedure and apparatus for feeding a material into a pressurized space  
The invention relates to a procedure and an apparatus for feeding solid material into a pressurized space. According to the invention, the apparatus comprises a feed chamber (12) communicating with...
5374147 Transfer device for transferring a substrate  
A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is...
5372647 Apparatus for forming thin film  
An apparatus for forming a thin film without spoiling contact resistances and breakdown voltage characteristics. The apparatus is so designed that at least one of first, second and third...
5372471 Single semiconductor wafer transfer method and manufacturing system  
A manufacturing system and method for processing semiconductor wafers through a plurality of processing stations that perform manufacturing operations on wafers includes a plurality of processing...
5370491 Method and apparatus for transferring articles between two controlled environments  
A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides...
5364225 Method of printed circuit panel manufacture  
Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel in...
5364219 Apparatus for clean transfer of objects  
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first...
5363872 Low particulate slit valve system and method for controlling same  
Low particulate slit valve system and method for controlling the closure pressure applied to a slit valve. An apparatus in accordance with the present invention includes a barrier having a slit...
5354380 Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus  
A plunger (14) is displaceably mounted in a vacuum chamber (42) and movable on a first linear path into the plane of substrate (20), for the mounting and for the transport of the mask (15) provided...
5344542 Multiple-processing and contamination-free plasma etching system  
The present invention includes plural plasma etching vessels and a wafer queuing station arrayed with a wafer transfer arm in a controlled environment. Wafers are movable within the controlled...
5340261 Load-lock unit and wafer transfer system  
A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being...
5336325 Enhanced vertical thermal reactor system  
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool down chamber, each sealed from...
5336029 Loading apparatus having a suction-hold mechanism  
A suction head having plural suction pads on both surfaces thereof is used to transfer a substrate of a compack disk and the like from one position to another for loading. The suction head is...
5333986 Transfer apparatus  
A transfer apparatus for transferring a semiconductor wafer has a base provided with a rotary driving source, and four arms having the same length. A first inner arm has an end fixed to the rotary...
5332013 Unmanned conveying device in clean room  
An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own...
5326211 Airlock system  
An air lock system for the transfer of large containers into a containment comprises a set of horizontally and vertically slidable doors adapted to define a variable opening for the passage of...
5310410 Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus  
A method wherein wafers are transferred between a loading chamber and a central vacuum chamber. A plurality of first vacuum processing chambers are disposed in a satellite relationship around the...
5308989 Fluid flow control method and apparatus for an ion implanter  
A fluid flow control for use with a process chamber. In the disclosed embodiment, the process chamber is for ion implantation of a workpiece such as a silicon wafer and the fluid flow control is to...
5306380 Vacuum processing apparatus  
A vacuum processing apparatus for LCD substrates comprises three process chambers. Each of these process chambers is connected to a first load lock chamber via a gate. A second load lock chamber is...
5303671 System for continuously washing and film-forming a semiconductor wafer  
A system for cleaning and film-forming a semiconductor wafer continuously comprises a washing section for removing native oxide from the surface of the wafer while applying hydrofluoric acid to the...
5295777 Wafer transport module with rotatable and horizontally extendable wafer holder  
A wafer transport module interconnects a horizontal wafer handler with a vertical wafer processor and includes an evacuatable housing with a first port in communication with the horizontal wafer...
5295522 Gas purge system for isolation enclosure for contamination sensitive items  
A reusable isolation enclosure has a closure member adapted for purging gases from the enclosure. The closure member includes filters and vapor and moisture drains. Replacement of ambient...
5292393 Multichamber integrated process system  
An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator,...
5291925 Equipment for forming temporary connections for the transfer of objects between discontinuous confined volumes  
An isolating chamber (1) with an annular connector (5) defines an access opening with one dimension greater than that perpendicular thereto and with an internal wall (5A) of constant section to...
5291923 Door opening system and method  
A reusable isolation structure features an easily cleanable shell. The opening of the shell includes a groove formed around the periphery thereof and is preferably not more than slightly smaller...
5288379 Multi-chamber integrated process system  
A vacuum processing apparatus capable of quickly replacing a substrate without opening the two gate valves simultaneously by using two waiting stages and a single transferring robot. The...
5286296 Multi-chamber wafer process equipment having plural, physically communicating transfer means  
In a multi-chamber process equipment in which a plurality of process chambers for processing a single wafer are connected with a wafer transfer chamber in parallel through respective gate valves,...
5284411 Conveyor for conveying workpieces in a vacuum chamber  
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and...
5281320 Wafer coating system  
Semiconductor wafers having patterns of steps and grooves defining microcircuit elements thereon are coated with metallic film by supporting the wafers individually adjacent a respective...
5280983 Semiconductor processing system with robotic autoloader and load lock  
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and...
5277579 Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system  
A wafers transferring method in the heat treatment apparatus of the vertical type comprising providing a boat loading/unloading chamber under a process tube, providing an elevator in the boat...
5275709 Apparatus for coating substrates, preferably flat, more or less plate-like substrates  
Apparatus for coating substrates by a vacuum coating process. The apparatus includes a plurality of closed processing chambers, each provided with an entrance/exit closable opening. The individual...
5273423 Heat treatment apparatus  
A heat treatment apparatus includes a process tube for heat treatment of an object to be heat treated, and a load lock chamber linked to the process tube and for housing the object to be heat...
5271702 Robotic substrate manipulator  
A robotic substrate manipulator constructed for substrate handling during thin film deposition in the vacuum of outer space. The robotic substrate manipulator includes a cassette holding a...
5261935 Clean air apparatus  
A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace...
5261776 Vacuum operated wafer transfer apparatus  
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer...
5259942 Device for transferring a workpiece into and out from a vacuum chamber  
A device for transferring a workpiece into and out from a vacuum chamber including a first device for receiving and holding the workpiece in a disk-shaped conveyor within the chamber and a second...
5254170 Enhanced vertical thermal reactor system  
An enhanced vertical thermal reactor system provides three isolated chambers including a wafer handling chamber, a process chamber including an elevator, and a cool-down chamber, each sealed from...
5234303 In-vacuum conveyance robot  
In a robot for conveying a workpiece or the like 21 in vacuum chambers (16, 24); a conveyance robot for use in a high vacuum, in which magnetic floatation and magnetic drive are applied to a...
RE34311 Semiconductor slice cassette transport unit  
A transport mechanism (40) for transporting a semiconductor slice cassette between a clean carrier (10) and a process machine comprises a housing (41) having a forward portion (42) positioned in...
Matches 651 - 700 out of 1067 < 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 >