Matches 601 - 650 out of 1067 < 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 >
Match Document Document Title
5583408 Two-axis magnetically coupled robot  
A robot having a pair of magnetic couplings that each couple a motor in a cylindrical first chamber to an associated cylindrical ring closely spaced from the cylindrical wall of said first chamber....
5575176 Three-dimensional positioning device  
This invention provides an apparatus or manipulator for positioning objects within a sealed chamber. The inventive positioning apparatus has a stator (or sleeve) sized and shaped for receiving a...
5575081 Device for transporting magazines for molding wafer-shaped objects  
The object of a device for transporting magazines for holding wafer-shaped objects is to ensure an exchange of gases within a SMIF box to the required extent at low cost and in an effective manner...
5571330 Load lock chamber for vertical type heat treatment apparatus  
The present invention is a load lock chamber for a vertical type heat treatment apparatus which has no elevating device which requires the provision of lubricating oil which is a source of...
5571325 Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus  
A substrate processing apparatus comprises a processing part and a transferring part. In the processing part there are a plurality of stages in which a plurality of processing units are arranged in...
5570994 Wafer tray and ceramic blade for semiconductor processing apparatus  
A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more...
5562800 Wafer transport method  
A wafer transport method includes the steps of preparing a semiconductor process equipment having a transport chamber and a process chamber. An interface means connects the transport chamber to the...
5562387 Device for transferring plate-like objects  
A plate-like object carrier device comprising plural arms arranged at a same pitch interval to horizontally support a wafer on each of the arms, a first motor for driving a single arm forward and...
5562383 Treatment apparatus  
A treatment apparatus comprises a treatment chamber for performing a treatment for a workpiece W, a loading chamber connected to the treatment chamber, for loading and unloading a holding member...
5558482 Multi-chamber system  
A vacuum-process system comprising plural vacuum-process chambers in which substrates are processed in decompressed atmosphere, a first load lock chamber communicated with each of the...
5549435 Chamber and a chamber combination for a vacuum facility and a method for transporting through at least one workpiece  
A chamber for a vacuum facility comprises at least one opening for the through-transport of workpieces, particularly of circular-disk-shaped workpieces such as storage disks during their treatment,...
5547328 Method and apparatus for transferring articles between two controlled environments  
A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides...
5544421 Semiconductor wafer processing system  
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...
5543022 Disc-handling apparatus  
A disc-handling apparatus for supporting a magnetic disc during material deposition and for transporting the disc into and out of a deposition station is described. The apparatus has a holder that...
5540821 Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing  
A heater and pedestal actuator is provided to actuate the pedestal of a deposition chamber from a first position wherein a wafer may be placed thereon to a second position adjacent to the...
5538390 Enclosure for load lock interface  
A load lock interface for a semiconductor wafer process chamber includes a platform adapted to receive and engage with a carrier containing a cassette of semiconductor wafers; and a removable...
5536320 Processing apparatus  
A waiting space is provided below a processing vessel for processing objects to be processed. An objects to be processed mount which is movable up and down into the processing vessel is disposed in...
5536128 Method and apparatus for carrying a variety of products  
An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing...
5525024 Cassette loader having compound translational motion  
A cassette loading mechanism for semiconductor processing equipment reduces the possibility of repetitive stress injury that may occur as a result of repeatedly loading and unloading a cassette of...
5515986 Plasma treatment apparatus and method for operating same  
An apparatus for plasma treating workpieces in vacuum includes a stack of plasma chambers (20). Handling of workpieces to and from the plasma chambers of the stack is performed in parallelism by...
5509772 System for the handling and confinement of flat objects in individual boxes  
The system according to the invention makes it possible to handle and transfer flat objects under an ultraclean atmosphere without using white rooms. It essentially comprises interfaces (5) making...
5509771 Vacuum processing apparatus  
A vacuum processing apparatus in which LCD substrates are processed includes three process chambers. Each of the process chambers is connected to a first load lock chamber through a gate valve. A...
5503675 Apparatus for applying a mask to and/or removing it from a substrate  
First and second transport chambers are joined to one another through a common opening (5), and house respective substrate carriers (6, 7) mounted for rotation about parallel axes. In at least one...
5501564 System for the storage and transportation of flat objects such as extra-flat boxes and its portable rack  
According to the present invention, a system for storing and distributing flat objects to different working stations is provided. The system comprises storage modules (2), transportation or...
5486080 High speed movement of workpieces in vacuum processing  
A high speed wafer processing apparatus employs two wafer transport robots to move wafers from two load locks past a processing station with gentle vacuum cycling and without pumpdown delays. Both...
5484004 Transfer closure valve for filling and emptying containers  
There is disclosed a transfer closure valve for safely filling and emptying containers of any type with a liquid, pasty or powdery medium. The medium flows from a barrel into another container...
5482161 Mechanical interface wafer container  
A standardized mechanical interface (SMIF) pod for use in conjunction with SMIF systems is disclosed. The pod is utilized for transporting article, such as semiconductor wafers or the like, between...
5478195 Process and apparatus for transferring an object and for processing semiconductor wafers  
Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to...
5474410 Multi-chamber system provided with carrier units  
A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette...
5472086 Enclosed sealable purgible semiconductor wafer holder  
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing...
5468112 Wafer container and wafer aligning apparatus  
A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from...
5468111 Disc loading and unloading assembly  
An assembly for transferring discs between disc manufacturing machinery or processes comprises a series of storage cassettes having discs stored therein. Each stored disc is retrieved from the...
5462397 Processing apparatus  
The processing apparatus of the present invention comprises a processing chamber for providing a predetermined processing to a processing object, a transfer chamber having transfer arm for...
5451131 Dockable interface airlock between process enclosure and interprocess transfer container  
Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock...
5451130 Method and apparatus for the step-by-step and automatic loading and unloading of a coating apparatus  
A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6)....
5445491 Method for multichamber sheet-after-sheet type treatment  
In a multichamber type sheet-after-sheet type of treating apparatus, there are provided an inlet/outlet port capable of independently control pressure and atmosphere in the port, a platform...
5445484 Vacuum processing system  
A vacuum processing system of a type in which wafer cassettes each accommodating a plurality of wafers to be treated are supplied to deliver the wafers and wafer cassettes collecting the treated...
5439522 Device for locking a flat, preferably discoid substrate onto the substrate plate of a vacuum coating apparatus  
In a device for locking a flat, discoid substrate 9 provided with a central opening 38 onto a substrate plate 22 provided with a centering post 35 projecting above the substrate bearing surface 42...
5435683 Load-lock unit and wafer transfer system  
A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being...
5435682 Chemical vapor desposition system  
This invention discloses a system for chemically depositing various materials carried by a reactant gas onto substrates for manufacturing semiconductor devices. The system includes special loading...
5433574 Gas purge unit for a portable container  
A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet...
5425611 Substrate handling and processing system  
This invention relates to a system for handling and processing thin substrates, such as substrates for magnetic disks. The system includes a main chamber, entrance and output load locks, a buffer...
5421979 Load-lock drum-type coating apparatus  
Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes...
5417537 Wafer transport device  
An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer...
5407314 Apparatus for synchronizing loading and unloading of substrates with turntable movement in a coating chamber  
Apparatus for loading and unloading disk-shaped substrates into and out of a vacuum coating chamber and for transporting the substrates within this chamber, having a first station for loading and...
5405231 Conveyor with rotary airlock apparatus  
An apparatus for transferring objects from a first region to a second reg, the first and second regions having differing atmospheric environments. The apparatus includes a shell having an entrance...
5405230 Load-lock unit and wafer transfer system  
A load-lock unit is disposed between first and second atmospheres, stores a wafer transferred from the first atmosphere, is blocked off from the first atmosphere, is thereafter set in the same...
5404894 Conveyor apparatus  
A thermal processing station is provided with a first conveyor that conveys a wafer from a first conveyor access portion and a second conveyor that conveys another wafer from a second conveyor...
5395198 Vacuum loading chuck and fixture for flexible printed circuit panels  
Disclosed is a system for handling large area, in-process, circuit panel layers. The circuit panel layers are thin and flimsy, and require rigid support for certain processing steps. The system...
5391035 Micro-enviroment load lock  
A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at...
Matches 601 - 650 out of 1067 < 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 >