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6123120 |
Clean storage equipment for substrates and method of storing substrates
Storage equipment simply and effectively maintains the cleanness of substrates stored therein. The substrates in the storage equipment are set in a pod. The storage equipment has removable covers,...
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6120229 |
Substrate carrier as batchloader
A semiconductor wafer batchloading system comprises a portable carrier for supporting and transporting wafers in a substantially particle free environment. A carrier door is movable between an open...
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6113694 |
Substrate treatment apparatus
Apparatus for coating a surface of a semiconductor wafer includes at least one treatment module, a handling device that may access each of the treatment modules, and a host controller connected to...
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6106213 |
Automated door assembly for use in semiconductor wafer manufacturing
An automated door assembly is provided for sealing an opening in a barrier to a contaminant-free environment suitable for semiconductor wafer processing. The door assembly comprises a base...
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6099598 |
Fabrication system and fabrication method
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are...
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6095741 |
Dual sided slot valve and method for implementing the same
A dual sided slot valve is in a vacuum body between adjacent process and transport modules. Separate valves are provided for each of two valve body slots, one body slot being separately closed or...
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6092980 |
Substrate treatment equipment and method with testing feature
An exclusive carrier (EQMC) housing therein equipment testing wafers (EQMW) is housed in a carrier housing rack (32) of a treatment equipment. An equipment testing parameter setting section (62) is...
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6083566 |
Substrate handling and processing system and method
The present invention relates in a system and method for handling and processing substrates for magnetic and optical media and other types of substrates, such as wafers and lenses, requiring...
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6082951 |
Wafer cassette load station
A pod loading station and method of operation are provided for enabling the transfer and introduction of wafers into a processing system from a wafer pod. The pod loading station generally includes...
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6082950 |
Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding
A front end staging method and apparatus is provided to introduce and remove a set of wafers from a vacuum processing system. The system generally comprises a support platform, one or more wafer...
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6082949 |
Load port opener
A load port opener for separating a pod top from a pod door so that a wafer-carrying cassette may be accessed and/or transferred from the pod into a semiconductor processing station, to which the...
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6082948 |
Controlled environment enclosure and mechanical interface
A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a...
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6079928 |
Dual plate gas assisted heater module
A dual plate gas assisted heater module having a vertically movable poppet movable between an upper and a lower subchamber has a passive heating feature which preheats a substrate prior to...
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6079927 |
Automated wafer buffer for use with wafer processing equipment
An automated wafer buffer is provided for use with a wafer processing system. The wafer buffer includes an I/O port for loading and unloading wafer containers, each holding a batch of wafers, a...
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6074154 |
Substrate treatment system, substrate transfer system, and substrate transfer method
A substrate transfer system comprising a cassette table for mounting a cassette which has an opening portion for loading and unloading a substrate and a cover detachably provided to the opening...
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6071350 |
Semiconductor device manufacturing apparatus employing vacuum system
An apparatus for manufacturing a semiconductor device employs a vacuum system, in which a heating source is installed in a predetermined portion of a venting-gas inlet. A venting-speed controlling...
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6071059 |
Loading and unloading station for semiconductor processing installations
In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room...
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6071055 |
Front end vacuum processing environment
The present invention provides a wafer process system that incorporates a multiple wafer processing system, such as a tandem wafer processing system, and a front end staging apparatus. The front...
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6068089 |
Releasable semiconductor wafer lifter basket
A wafer lifter basket assembly includes a wafer lifter basket and a base, the base including a bracket and a bracket holder. The wafer lifter basket is mounted to the bracket, and the bracket...
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6068088 |
Releasable semiconductor wafer lifter basket
A wafer lifter basket assembly includes a wafer lifter basket and a base, the base including a bracket and a bracket holder. The wafer lifter basket is mounted to the bracket, and the bracket...
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6066210 |
Substrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure section
A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate...
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6059507 |
Substrate processing apparatus with small batch load lock
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support...
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6058740 |
Glass substrate deposition system having lateral alignment mechanism
A deposition system (20) for depositing a material layer on a glass sheet substrate includes a lateral alignment mechanism (28) for laterally aligning glass sheet substrates with an ingress seal...
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6056026 |
Passively activated valve for carrier purging
A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central...
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6053980 |
Substrate processing apparatus
A substrate processing apparatus comprises a substrate transfer section, connection modules attached to the substrate transfer section, and a first substrate transfer robot in the substrate...
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6053688 |
Method and apparatus for loading and unloading wafers from a wafer carrier
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided...
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6053686 |
Device and method for load locking for semiconductor processing
There is provided a load-lock device which allows high productivity and occupies a small space. There is provided a load-lock device which stands by with objects to be processed loaded thereon in...
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6048162 |
Wafer handler for multi-station tool
A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable...
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6048154 |
High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock
A dual stage load lock is provided for transfer of semiconductor wafers between an environment at atmospheric pressure and a high vacuum environment, such as a wafer processing system. The dual...
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6045620 |
Two-piece slit valve insert for vacuum processing system
A vacuum processing system has a transfer chamber with a slit valve at which is attached a process chamber and with a slit valve insert disposed in the slit valve for matching up with the process...
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6045315 |
Robot apparatus and treating apparatus
A robot apparatus has a rotatable arm member. A stationary pulley is arranged in the center of the arm member, while a pair of rotatable pulleys are arranged at the respective ends of the arm...
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6045299 |
Unidirectional gate between interconnecting fluid transport regions
A unidirectional gate disposed between interconnecting fluid transport regions in a manufacturing process. The gate allows workpieces to pass from a first transport region to a second transport...
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6044874 |
Sealed container and sealed container ambient gas substitution apparatus and method
First and second wall portions respectively spread along first and second opposing inner surfaces of a housing portion, and a plurality of vent pores that are distributed along the first and second...
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6042651 |
Molecular contamination control system
The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a...
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6042623 |
Two-wafer loadlock wafer processing apparatus and loading and unloading method therefor
Wafers from plural non-vacuum multiple wafer carriers are loaded and unloaded in an atmospheric front end of a wafer processing machine and transferred to and from a high vacuum chamber of a...
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6042324 |
Multi-stage single-drive FOUP door system
Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical...
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6040585 |
Method for detecting wafer orientation during transport
The orientation of a wafer carried on a blade of a semiconductor wafer transfer system is sensed in order to prevent wafer damage during transfer of the wafer from chamber-to-chamber within a...
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6024800 |
Plasma processing apparatus
According to the present invention, a plasma processing apparatus for performing surface processing of a substrate by means of plasma discharge is provided comprising: a processing chambers 10R and...
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6014817 |
Semiconductor wafer processing system
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...
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6007675 |
Wafer transfer system and method of using the same
An apparatus and method are described for stripping the photoresist from a wafer while in a substantially parallel manner, another wafer is being transferred between a load lock chamber and a...
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6000905 |
High speed in-vacuum flat panel display handler
Transport of a workpiece into and out of high vacuum conditions is achieved using a vacuum handler having an ante-chamber which buffers a vacuum lock and other mechanically vulnerable components...
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5997290 |
Revolving transfer furnace for treating workpieces
A furnace body (10) houses a treatment rotor (30) which has charge locations (36) to take up a workpiece charge each and is supported so as to be driven in rotation around a central axis (A). The...
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5997235 |
Swap out plate and assembly
A load lock is comprised of a housing defining a partial chamber therein opening to a first face, the load lock defining a given point on which the center of a substrate is supported. A swap out...
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5996241 |
Semiconductor wafer processing system with immersion module
A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which...
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5988233 |
Evacuation-driven SMIF pod purge system
A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes...
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5984610 |
Pod loader interface
The pod loader interface is a machine that is able to automatically open a SMIF pod and unload the contents thereof. An elevator raises the SMIF cover away from its base to reveal the wafer boat...
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5984150 |
Material transfer device with multi-chamber rotor
A transfer device for passing material between two different fluid environments which uses a multi-passageway rotor member rotatable about a vertical axis and interposed between upper and lower...
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5975825 |
Transfer apparatus for wafers
A transfer device for wafers stacked in magazines has a vertically displaceable frame of a platform, with which the cover of the box surrounding the magazine in the closed condition. The magazine...
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5971696 |
System for carrying-in of cassette for substrates to be processed
There is provided a cassette carrying-in system, which can rotate a cassette housing therein substrates to be treated so that the substrates are changed from a vertical state to a horizontal state...
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5964561 |
Compact apparatus and method for storing and loading semiconductor wafer carriers
An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool. The apparatus comprises a plurality of storage...
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